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GOST R 8.716-2010
Title State system for ensuring the uniformity of measurements. Reflectometers of the extreme ultraviolet radiation for measurements of the characteristics of multilayer nanostructures in the wavelength range 10 to 30 nm. Procedure of measurements
Technical Committee RF386 - Основные нормы и правила по обеспечению единства измерений в области ультрафиолетовой спектрорадиометрии
Effective from:01/01/2012